Compact SR Machines and Their Applications for Microfabrication

Yanping Zhang, Sumitomo Heave Industries, Ltd.

As a commercial SR machine, the compact superconducting SR machine AURORA has been installed in Ritsumeikan University since April 1996, playing a major role in the research and education of the University. As the next commercial SR machine, a compact SR machine AURORA-2D has been constructed in Hiroshima University, using normal magnets which can reduce cost in the construction and maintenance. The injection has been successfully carried out with a microtron and the first synchrotron radiation has been observed. Since we regard the compact SR machine as a future fabrication machine instead of research facilities, it has been applied to microfabrication such as x-ray lithography, high aspect-ratio micromachining (including the LIGA process) and deposition of thin films. Some of our recent research for microfabrication will be present.

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